Semiconductor manufacturing has extremely high requirements for the vacuum environment and process cleanliness. Traditional oil-lubricated vacuum pumps generate oil mist during operation, posing a risk of contaminating wafers, targets, and vacuum chambers. They also require regular oil changes and maintenance, affecting continuous production. Leynow oil-free vacuum pumps adopt an oil-free lubrication structure to prevent oil contamination from entering the vacuum system from the source, and have become the preferred configuration for multiple processes such as wafer adsorption, CVD/PVD coating, plasma etching, ion implantation, lithography, and wafer handling.
Challenges Faced by the Industry
The requirements of semiconductor manufacturing for vacuum systems are not just about "pulling a vacuum", but more importantly, ultra-high cleanliness, high ultimate vacuum, stable repeatability, and low vibration. In practical applications, customers often encounter the following types of problems:
Risk of Oil Contamination
Oil-lubricated vacuum pumps generate oil mist during exhaust, which may contaminate wafers, targets, and vacuum chambers, affecting film quality and device yield.
Insufficient Ultimate Vacuum and Pumping Speed
Processes such as etching, coating, and ion implantation have high requirements for ultimate vacuum and pumping speed. Insufficient pumping speed will prolong process time and affect production capacity.
Unstable Continuous Operation
Semiconductor production lines often require 24-hour continuous operation. Pump body overheating or vacuum fluctuations will directly affect etching uniformity and film consistency.
High Maintenance Costs
Vacuum pump oil needs to be replaced regularly. Under working conditions containing process by-products, the oil is prone to deterioration, and downtime for maintenance affects overall production efficiency.
Leynow Semiconductor Technology Industry Solutions
Targeting the actual working conditions of semiconductor manufacturing, Leynow provides overall vacuum solutions centered on oil-free vacuum pumps, forming a complete service closed loop from equipment selection and installation and commissioning to post-maintenance.
Clean and Oil-free Vacuum Acquisition Method
Oil-free vacuum pumps adopt a self-lubricating structure, and the inner wall of the cylinder is specially treated. They do not generate oil mist or exhaust gas, preventing lubricating oil from entering the vacuum system, meeting the high cleanliness requirements of semiconductor manufacturing for wafers and vacuum chambers.
Selection Solutions Matched to Semiconductor Processes
Based on the process type, chamber volume, ultimate vacuum requirements, and pumping speed requirements, professional engineers provide selection suggestions to avoid efficiency and lifespan issues caused by "using a large pump for a small job" or "overloading a small pump".
Guarantee of Stable and Continuous Operation
For semiconductor production lines operating continuously for 24 hours, the heat dissipation and anti-corrosion structures are optimized to reduce the risks of pump body overheating and by-product deposition, maintain stable vacuum degree output, and ensure the consistency of etching and coating processes.
Full-cycle Service and Parts Guarantee
Providing installation and commissioning, regular follow-up visits, and maintenance contract services. Repair parts are Leynow original genuine parts. All repair projects come with a 12-month warranty to reduce unplanned downtime.
Core Configured Equipment
According to different semiconductor application scenarios, the following core equipment can be flexibly configured:
| Application Process | Recommended Equipment | Main Function |
|---|---|---|
| Wafer Vacuum Adsorption | Oil-free Vacuum Pump / Vacuum Unit | Wafer adsorption positioning and transfer, ensuring processing precision |
| CVD / PVD Coating | Oil-free Vacuum Pump | Pre-coating vacuum pumping and process vacuum maintenance, ensuring film uniformity |
| Plasma Etching | Oil-free Vacuum Pump | Etching chamber vacuum pumping and reactive gas exhaust |
| Ion Implantation | Oil-free Vacuum Pump / Vacuum Unit | Maintenance of high vacuum environment in the implantation chamber, ensuring implantation uniformity |
| Lithography and Wafer Handling | Oil-free Vacuum Pump | Lithography machine vacuum adsorption and wafer robotic arm handling |
Typical Application Scenarios
Leynow oil-free vacuum pumps have been widely used in multiple key processes of the semiconductor technology industry:
Wafer Vacuum Adsorption
Providing stable vacuum for wafer adsorption platforms, ensuring positioning precision for lithography and inspection.
Plasma Etching
Used for etching chamber vacuum pumping and process vacuum maintenance. Clean and oil-free, avoiding wafer contamination.
CVD Coating
Used for vacuum pumping of CVD/PVD coating equipment. High-cleanliness vacuum environment ensures film quality.
What Customers Can Gain
Choosing Leynow semiconductor technology industry vacuum solutions, customers can achieve practical improvements from the following dimensions:
Cleanliness Guarantee
Oil-free structure avoids oil mist contamination, ensuring wafer and chamber cleanliness
Stable Operation
Stable vacuum degree output, adapting to 24-hour continuous operation of semiconductor production lines
Cost Optimization
No need for frequent replacement of vacuum pump oil, reducing consumables and maintenance costs
Service Response
24/7 fault support, on-site service can be arranged in the Pearl River Delta region
