Facing the pain points of traditional vacuum pumps, analyzing various challenges in precision vacuum applications.
Oil vapor backflow from oil-lubricated vacuum pumps contaminates the instrument chamber, causing test distortion and scrapping of coated products.
Traditional pumps have high noise and vibration, which interfere with instruments and operators when placed in laboratories or integrated into equipment cabinets.
Rotating shaft seals are prone to wear, causing media to leak outward, unstable vacuum degree, and inability to recover rare gases.
Replacement of wearing parts requires returning to the factory for disassembly, resulting in a long equipment downtime cycle and affecting the experimental progress of precision instrument production lines.
Oil-free clean vacuum, solving various pump pain points in precision working conditions.
Non-contact dry compression between fixed and orbiting scrolls; metal bellows static sealing, no rotating shaft seal, preventing process medium leakage and contamination.
Continuous and smooth scroll compression, small gas pulsation; optimized dynamic balance of the whole machine, low noise and vibration, suitable for laboratories and built-in instruments.
Long-life lubricated bearings; maintenance only requires replacing the scroll tip seal without special tools, completed by the operator on-site without returning to the factory for disassembly.
Excellent performance in the medium vacuum range, oil-free and does not contaminate the chamber, suitable for complete high-vacuum systems of turbo molecular pumps and helium mass spectrometer leak detectors.
Full WX0020H / WX0040H / WX0080H series, available as standalone machines or as built-in vacuum sources for equipment.
Scroll tip seals and filters in stock from the original factory; mature experience in leak detection and gas recovery, full support for selection, troubleshooting, and factory repair and maintenance.
Twin-screw non-contact dry compression, high pumping speed, high ultimate vacuum
Oil-free and clean, strong resistance to dust and condensable gases
Suitable for demanding processes such as semiconductors, chemicals, pharmaceuticals, and coating
Representative models: LS Series
Can be used independently, and is also often used as a backing pump for Roots pumps
Multi-stage claw rotor non-contact dry compression, compact structure
Oil-free with no wearing parts, suitable for extracting condensable gases
Low noise and low vibration, stable and reliable long-term operation
Representative models: LC Series
Chemical distillation, vacuum drying, semiconductor backing pre-pumping
Single-sided scroll dry oil-free compression, fully sealed without shaft seals
Low noise and low vibration, virtually maintenance-free, on-site seal replacement
Ideal dry backing pump for helium mass spectrometer leak detectors and turbo molecular pumps
Representative models: WX Series
Analytical instruments, gas recovery, semiconductor coating, scientific research experiments
Graphite rotary vane dry structure, no vacuum pump oil required, no risk of oil mist pollution
Outputs clean gas, protecting materials from oil and gas contamination
Suitable for food, pharmaceutical, transportation, power generation, and processes with zero tolerance for oil and gas
Representative Model: LX Series
Graphite vanes will produce trace amounts of graphite dust; a front-end filter device is necessary
Reciprocating piston all-oil-free structure, no lubricating oil required in the pump cavity, outputs clean air source
Compact and small model, easy to embed in equipment cabinets or integrate into automated machines
Low noise operation, H-type for high negative pressure, V-type for large flow rate, selection according to working conditions
Representative Model: LP Series
Suitable for clean negative pressure scenarios such as oxygen generation, medical, and laboratory
Double rotor non-contact dry compression, compact structure, large pumping speed in the medium vacuum range
Dry oil-free operation, no rotor wear, needs to be connected in series with a backing pump to form a unit
Low noise and low vibration, industrial motor supports long-term continuous operation
Representative Model: LR Series
Suitable for vacuum packaging, coating, pharmaceutical, electronics, and chemical distillation backing vacuum
Specifications overview of the oil-free vacuum pump series for quick matching and selection.
| Product Model | Motor Power | Ultimate Vacuum | Rated Voltage | Rated Current | Rated Flow | Product Category |
|---|---|---|---|---|---|---|
LS 0020F |
1.1 Kw | 3 Pa | AC△200-240V/Y345-415V | 18 m3/h | 3.0 A | ScrewPumps |
LS 0200F |
4.6 Kw | 2.0 Pa | △345-415V/Y600-720V | 180 m3/h | 9.0△/5.2Y | ScrewPumps |
LS 0400F |
7.5 Kw | 5.0 Pa | △345-415V/Y600-720V | 396 m3/h | 16.7△/9.6Y | ScrewPumps |
LS 0540F |
15.0Kw | 5.0 Pa | △345-415V/Y600-720V | 540 m3/h | 32.5△/18.8Y | ScrewPumps |
LS 0800F |
22.0Kw | 1.0 Pa | △345-415V/Y600-720V | 800 m3/h | 37.0△/21.0Y | ScrewPumps |
The WX dry scroll vacuum pump is based on single-sided scroll technology, integrating dry compression with a fully enclosed structure. The pump body consists of a fixed scroll and an orbiting scroll.
The motor drives the orbiting scroll to perform eccentric revolution, and the orbiting scroll moves along the internal track of the fixed scroll; continuously forming, moving, and shrinking crescent-shaped compression chambers; gas is drawn in from the inlet, compressed through the scroll chambers, and discharged from the central exhaust port.
Metal bellows static sealing, no rotating shaft seal, preventing process gas leakage; long-life lubricated bearings; maintenance only requires replacing the scroll tip seal without special tools, which can be done by the operator on-site.
The entire machine has low noise and low vibration, and is a well-proven dry vacuum solution for medium vacuum analytical instruments and scientific equipment.
Compiled technical reference materials related to vacuum pumps for selection, equipment commissioning, and troubleshooting.
Covering precision processes in multiple fields, meeting various clean vacuum usage requirements.

Supporting various physical and chemical analytical instruments, providing clean and oil-free medium vacuum sources.

Processing of semiconductor and electronic devices, preventing oil vapor from contaminating workpieces.

Standard dry backing pump for helium mass spectrometer leak detectors, ensuring accurate leak detection data.

Recovery of inert and rare gases, with media protected from pump oil contamination.

Sample coating and surface treatment, dry and oil-free to protect film quality.

Experimental chambers in universities and research institutes, low noise suitable for indoor experimental environments.

Vacuum source for precision medical instruments, clean and oil-free.

Roughing vacuum units for high energy physics equipment and beamlines.

As a dry backing pump for helium leak detection equipment, ensuring accurate and reliable leak detection results.

Dry and oil-free backing pump, protecting the molecular pump and building a complete high vacuum system.

Fully sealed structure, recovered gas is not contaminated by pump oil.

Sample coating and thin film deposition, oil-free to avoid film contamination.

Pre-pumping of various laboratory chambers, low noise suitable for indoor environments.

Pre-pumping of glove box chambers to obtain a clean medium vacuum environment.

Degassing and vacuum processing of electronic components, protecting device quality.

Directly embedded in equipment cabinets, serving as a built-in dry vacuum unit for the entire machine.
Usage Limitations: Not suitable for extracting large amounts of dust, highly corrosive media, or large amounts of condensable water vapor; a filter is recommended at the front end to protect the pump chamber; do not extract high-concentration oxygen media.
Selection Recommendation: For precision instruments, helium leak detection, and molecular pump backing, prioritize WX scroll dry pumps; for rough vacuum adsorption scenarios, oil-free carbon vane rotary vane vacuum pumps can be selected.
Answering various questions on dry vacuum pump selection, use, and maintenance.
Scroll pumps have non-contact fixed and orbiting scrolls, no carbon vane consumables, lower vibration and noise, fully sealed with no shaft seal leakage, and are more suitable for precision instrument leak detection and molecular pump backing; carbon vane rotary vane pumps rely on graphite carbon vane friction, and carbon vanes are consumables, making them more suitable for rough vacuum conditions such as CNC and packaging adsorption.
The WX series dry scroll pump is an ideal dry backing pump for turbo molecular pumps. It is oil-free and will not contaminate the molecular pump and chamber, and is widely used in high vacuum analytical equipment.
No; the main maintenance point is the scroll tip seal, which can be replaced on-site without returning to the factory; regularly check the intake filter; bearings are long-life lubricated, and periodic inspections are sufficient.
Highly suitable, fully static sealing with no shaft seal leakage; the pump chamber is dry and oil-free, will not contaminate helium and various rare gases, ensuring the purity of recovered gas.
Complete original factory scroll tip seals and intake filter accessories; providing technical consultation, troubleshooting, and factory repair and maintenance.
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