无油涡旋真空泵的特点与应用领域

无油涡旋真空泵的特点与应用领域

Article Source: Leynow Vacuum Pump 2020-06-19 09:17:28 Views
Home > News > Industry News > 无油涡旋真空泵的特点与应用领域

清洁的真空环境一直是科学家和企业界追求的理想真空环境.自能够创造真空环境开始,人们就试图采用不同手段达到清洁真空的效果.时至今日,清洁真空获得设备已经发展到冷凝泵、柱塞泵、爪式泵、涡旋泵以及隔膜泵等多种产品,在现有的无油真空泵当中,无油涡旋真空泵与其他种类的无油真空泵相比具有下述特点:

①无油,无摩擦——真空腔内无油,非接触,无磨损,不产生微粒尘埃污染,可获得清洁真空

②抽气量大——双涡旋盘,结构与单级相比相同直径泵抽气容积为2倍,节省能源

③抽气效率高——带有3-4个抽气单元,压差小;大气与真空之间由O型圈密封,泄漏低

④非接触,良好平衡,力矩影响小,噪音低,振动小

⑤结构简单紧凑,相同尺寸下,运动半径小,运行平稳

⑥体积小,维修方便,维护费用低

⑦采用空气冷却,无需水冷

目前无油涡旋真空泵的应用领域为:

①半导体行业——薄膜制备设备、半导体器件封装设备

②科学仪器行业——同步辐射光束线、电子显微镜、分析测试仪器

③机械设备行业——材料制备设备、真空检测、材料提纯设备

④化学工业

⑤医疗设备——牙科仪器、透析机、生物制品与药品制备

⑥包装行业——食品、药品、生物制品等包装设备

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